dc.contributor.advisor | Liu, Yingtao | |
dc.contributor.author | Boone, Bryan | |
dc.date.accessioned | 2020-08-11T18:20:27Z | |
dc.date.available | 2020-08-11T18:20:27Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://hdl.handle.net/11244/325376 | |
dc.description.abstract | This thesis outlines the design of a custom substrate heater for use in physical vapor deposition
of laboratory thin films. Traditional substrate heaters bring a substrate to temperature through a
reliance on the conductive heat transfer of a single side of the substrate. Within a vacuum this
mode of heat transfer suffers, due to the imperfectly mated conductive surfaces of the substrate
and heater. In contrast, this design sandwiches the substrate between two heaters to provide both
the traditional conductive heat as well as radiative heat transfer from the opposing heater. In combination
with an intricate insulating structure, which off-the-shelf heaters do not generally provide,
this design can efficiently bring substrates to a more uniform temperature, which results in
the growth of a higher-quality thin film. It also accommodates an integrated heat-sink to quickly
cool the substrate and deposition for handling, despite the insulating materials. | en_US |
dc.language | en_US | en_US |
dc.rights | Attribution 4.0 International | * |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | * |
dc.subject | Physics, Condensed Matter. | en_US |
dc.subject | Engineering, Materials Science. | en_US |
dc.subject | Engineering, Mechanical. | en_US |
dc.title | Designing a Substrate Heater for Thin-Film Deposition in High Vacuum | en_US |
dc.contributor.committeeMember | Bumm, Lloyd | |
dc.contributor.committeeMember | Shabgard, Hamidreza | |
dc.date.manuscript | 2020-07-30 | |
dc.thesis.degree | Master of Science | en_US |
ou.group | Gallogly College of Engineering::School of Aerospace and Mechanical Engineering | en_US |