Manufacturing and performance evaluation of carbon nanotube-parylene sandwich thin films
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Date
2007-06Author
Chen, Chia-Ling
Lopez, Ernesto
Jung, Yung-Joon
Dokmeci, Mehmet R.
Muftu, Sinan
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Parylene-C, an inert and relatively mechanically strong polymer, which can be deposited in a conformal manner, is a promising substrate candidate for flexible electronics (Flextronics) devices. Parylene-CNT sandwich-films were fabricated by utilizing single-walled carbon nanotube (SWNT) layers sandwiched between two, 10 μm thick parylene layers. The device was fabricated using shadow mask technology and SWNT drop casting on top of the Parylene substrate. The electrical conductivity and mechanical properties of the samples were tested under tensile loading. The load-unload tests showed small change in electrical resistance (~1%) when applying a strain in the range 0 - 2%, with negligible hysterisis. The tensile test also showed ~32% increase in the elastic modulus (E) of the sandwich film, relative to pure parylene. Potential applications are in interconnects for flexible electronics devices, and strain sensors for biological systems.
Citation
Chen, C.-L., Lopez, E., Jung, Y.-J., Dokmeci, M. R., & Muftu, S. (2007, June). Manufacturing and performance evaluation of carbon nanotube-parylene sandwich thin films. Paper presented at the Ninth International Conference on Web Handling (IWEB), Stillwater, OK.