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dc.contributor.authorColeman, Glenn Craddock,en_US
dc.date.accessioned2013-08-16T12:22:33Z
dc.date.available2013-08-16T12:22:33Z
dc.date.issued1966en_US
dc.identifier.urihttps://hdl.handle.net/11244/2037
dc.format.extentvii, 126 leaves :en_US
dc.publisherThe University of Oklahoma.en_US
dc.subjectEngineering, Electronics and Electrical.en_US
dc.subjectSputtering (Physics)en_US
dc.subjectElectric discharges through gases.en_US
dc.titleSputtering in glow discharge /en_US
dc.typeThesisen_US
dc.thesis.degreePh.D.en_US
dc.noteSource: Dissertation Abstracts International, Volume: 27-04, Section: B, page: 1150.en_US
ou.identifier(UMI)AAI6610496en_US
ou.groupOther


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