Browsing OSU - Faculty and Staff Publications by Author "Dalal, Vikram L."
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Low temperature epitaxial silicon film growth using high vacuum electron-cyclotron-resonance plasma deposition
DeBoer, Scott J.; Dalal, Vikram L.; Chumanov, George; Bartels, Randy (AIP Publishing, 1995-05-08)We report on the growth technique and electrical properties of epitaxial Si films grown at low temperatures using an electron‐cyclotron‐resonance plasma deposition technique. We have used standard high vacuum apparatus to ...