Microelectromechanical Resonators with Passive Frequency Tuning Using Variable Impedance Circuits
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Date
2013-01-08Author
Abdolvand, Reza
Ghahsareh, Mohsen Shahmohammadi
Modarres-Zadeh, Mohammad J.
Board of Regents/Oklahoma State University and the A & M Colleges
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Periodic signal generators include an oscillator circuit, which is configured to generate a first periodic signal at an output thereof, and a piezoelectric-based microelectromechanical resonator. The resonator is configured to generate a second periodic signal at a first electrode thereof, which is electrically coupled to the oscillator circuit. A variable impedance circuit is provided, which is electrically coupled to a second electrode of the piezoelectric-based microelectromechanical resonator. The variable impedance circuit is configured to passively modify a frequency of the second periodic signal by changing an induced electromechanical stiffness in at least a portion of the piezoelectric-based microelectromechanical resonator.
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