Q Enhancement in Micromachined Lateral-extensional Resonators
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Date
2012-07-24Author
Abdolvand, Reza
Harrington, Brandon
Board of Regents/Oklahoma State University and the A & M Colleges
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A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to reflect a substantial portion of planar acoustic energy received from the tether back into the tether.
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