Q Enhancement in Micromachined Lateral-extensional Resonators
![Thumbnail](/bitstream/handle/11244/15418/pat8228141.pdf.jpg?sequence=9&isAllowed=y)
View/ Open
Date
2012-07-24Author
Abdolvand, Reza
Harrington, Brandon
Board of Regents/Oklahoma State University and the A & M Colleges
Metadata
Show full item recordAbstract
A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to reflect a substantial portion of planar acoustic energy received from the tether back into the tether.
Collections
- Patents [208]