Method and Apparatus for Magnetic Float Polishing
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Date
2007-08-07Author
Komanduri, Ranga
Kirtane, Tejas Shrikant
Gerlick, Robert Edward
Umehara, Noritsugu
Jain, Vijay Kumar
Board of Regents/Oklahoma State University and the A & M Colleges
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A method of polishing workpieces in a magnetic float polishing chamber comprising a lower chamber piece and an upper chamber piece which is removably receivable in the lower chamber piece and is connected to a powered spindle for rotating the upper chamber piece in the polishing operation. The method preferably comprises one or more of the steps of (a) geometrically aligning the upper chamber piece with the powered spindle by machining the upper chamber piece in-situ, (b) machining the contact surface of the upper chamber piece in-situ between various polishing runs, and (c) mounting the lower chamber piece in a manner effective for causing the lower piece to automatically self-align coaxially with the upper chamber piece.
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