Browsing OSU Theses by Subject "vibration sensor"
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Wireless Sensor Fusion Approach for Monitoring Chemical Mechanical Planarization (CMP) Process
(Oklahoma State University, 2010-12-01)Chemical mechanical planarization (CMP) is used in the microelectronics and optical industries for local as well as global planarity and for producing mirror finished surfaces. Roughness (Ra), within- non-uniformity (WIWNU), ...