Browsing OSU Theses by Subject "temperature sensor"
Now showing items 1-2 of 2
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Nonlinear Finite Element Modeling of Quartz Crystal Resonators
(Oklahoma State University, 2011-07-01)In order to facilitate the design of quartz resonators, the overall goal of the current work was to develop an accurate three-dimensional finite element model for the anisotropic frequency response of quartz. The model was ... -
Wireless Sensor Fusion Approach for Monitoring Chemical Mechanical Planarization (CMP) Process
(Oklahoma State University, 2010-12-01)Chemical mechanical planarization (CMP) is used in the microelectronics and optical industries for local as well as global planarity and for producing mirror finished surfaces. Roughness (Ra), within- non-uniformity (WIWNU), ...