Browsing OSU Theses by Author "Kandasamy Arulmozhi, Anant"
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Experimental and Molecular Dynamics Studies on Copper Electrochemical Mechanical Polishing (Cu-Ecmp)
Kandasamy Arulmozhi, Anant (Oklahoma State University, 2013-07-01)In recent times, copper electrochemical mechanical polishing (Cu ECMP) has received a great deal of interest from electrochemists and the semiconductor manufacturing industry. This attention is primarily due to its potential ...