Browsing OSU Theses by Author "Kanbargi, Ganesh P."
Now showing items 1-1 of 1
-
Micromachining of Borosilicate Glass and Laser Induced Backside Wet Etching of Quartz Using an Excimer Laser (248 Nm)
Kanbargi, Ganesh P. (Oklahoma State University, 2005-07-01)Borosilicate glass is widely used in optical communications, optoelectronics as well as biomedical technologies and microelectromechanical systems (MEMS). Laser micromachining is an alternative approach for machining of ...