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Molecular Dynamics (MD) Simulations of Chemical Vapor Deposition (CVD) of Carbon Dimer on a Diamond (100) Surface and Application of Neural Networks (NN) for Event Probability Predictions
(Oklahoma State University, 2005-07-01)
Carbon dimers are found to be an important growth species in the growth of nanocrystalline diamond (NCD) through CVD process. Events, such as chemisorption, reflection, and desorption occur during the deposition of carbon ...