Browsing by Author "Lih, Wen-Chen"
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Modeling and optimization of Chemical Mechanical Planarization (CMP) using neural networks, ANFIS and evolutionary algorithms
Lih, Wen-Chen (2006-05)Scope and Method of Study: The purpose of this study is to provide new approaches to improve the current modeling and optimization of the chemical mechanical planarization or polishing (CMP) process. Neural Networks (NN), ...