Browsing by Subject "H03H 9/2405 (20130101)"
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Q Enhancement in Micromachined Lateral-extensional Resonators
(U.S. Patent and Trademark Office, 2012-07-24)A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to ...