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    • Q Enhancement in Micromachined Lateral-extensional Resonators 

      Abdolvand, Reza; Harrington, Brandon; Board of Regents/Oklahoma State University and the A & M Colleges (U.S. Patent and Trademark Office, 2012-07-24)
      A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to ...